Nyob rau hauv high-tech teb ntawm semiconductor manufacturing, txhua kauj ruam yuav tsum exceptional precision thiab huv si. Cov roj hmab tshwj xeeb cov ntsaws ruaj ruaj, raws li cov khoom tseem ceeb uas ua kom ruaj khov ntawm cov cuab yeej tsim khoom thiab tswj kom muaj qhov chaw tsim khoom huv si, muaj kev cuam tshuam ncaj qha rau cov txiaj ntsig thiab kev ua haujlwm ntawm cov khoom siv semiconductor. Niaj hnub no, peb yuav piav qhia txog yuav ua li cas tshwj xeeb roj hmab foob xws li fluororubber thiab perfluoroelastomer ua lub luag haujlwm tseem ceeb hauv kev tsim khoom semiconductor.
I. Cov Kev Xav Tau Ntawm Semiconductor Manufacturing Environments
Kev tsim khoom semiconductor feem ntau yog ua nyob rau hauv chav huv, qhov twg ib puag ncig huv yuav tsum muaj siab heev. Txawm hais tias me me ntawm cov kab mob tuaj yeem ua rau nti luv luv lossis lwm yam kev ua haujlwm tsis zoo. Tsis tas li ntawd, cov txheej txheem tsim khoom suav nrog kev siv ntau yam tshuaj corrosive, xws li photoresists, etching solutions, thiab ntxuav cov kua. Tsis tas li ntawd, qee cov txheej txheem txheej txheem muaj qhov kub thiab txias hloov pauv. Piv txwv li, etching thiab ion implantation txheej txheem tsim kom muaj qhov kub thiab txias hauv cov khoom siv. Tsis tas li ntawd, precipitates los ntawm cov ntsaws ruaj ruaj tuaj yeem muaj kev cuam tshuam loj rau kev tsim khoom semiconductor. Txawm tias muaj pes tsawg tus precipitates tuaj yeem paug cov ntaub ntawv semiconductor lossis cov txheej txheem, cuam tshuam qhov tseeb ntawm cov txheej txheem ntau lawm.
II. Lub luag haujlwm tseem ceeb ntawm Cov Roj Hmab Tshwj Xeeb
1. Tiv thaiv Particle Contamination: Cov roj hmab tshwj xeeb seals zoo thaiv cov plua plav, impurities, thiab lwm yam khoom los ntawm ib puag ncig sab nraud los ntawm kev nkag mus rau hauv cov cuab yeej, tswj kom huv si. Noj perfluoroelastomer seals ua piv txwv, lawv qhov chaw du tiv taus particle absorption. Lawv zoo heev yooj yooj yim tso cai rau lawv kom haum nruj rau cov khoom siv, tsim ib tug txhim khu kev qha sealing barrier thiab xyuas kom meej tias cov semiconductor manufacturing txheej txheem yog dawb los ntawm particle contamination.
2. Resisting Chemical Corrosion: Cov ntsaws ruaj ruaj xws li fluorocarbon thiab perfluoroelastomer muaj kev tiv thaiv zoo heev rau cov tshuaj reagents feem ntau siv hauv kev tsim khoom semiconductor. Fluorocarbon seals yog resistant rau ntau acidic thiab alkaline daws thiab organic solvents, thaum perfluoroelastomer seals yog tshwj xeeb tshaj yog ruaj khov nyob rau hauv heev oxidizing thiab corrosive tshuaj ib puag ncig. Piv txwv li, nyob rau hauv cov txheej txheem ntub dej etching, perfluoroelastomer ntsaws ruaj ruaj tuaj yeem tiv taus ntev kev sib cuag nrog cov kua qaub etching cov kev daws teeb meem tsis muaj corrosion, ua kom cov khoom sib khi thiab ruaj khov ntawm cov khoom siv.
3. Kho kom haum rau qhov kub thiab txias hloov pauv: Cov khoom siv hluav taws xob semiconductor tau ntsib qhov kub thiab siab hloov pauv thaum lub sijhawm ua haujlwm. Cov roj hmab tshwj xeeb cov ntsaws ruaj ruaj yuav tsum tau zoo heev- thiab qis-kub kuj, nrog rau zoo elasticity thiab siab tsis kam. Fluororubber seals tuav zoo elasticity thiab sealing zog nyob rau hauv ib tug tej yam kub thiab txias, hloov mus rau qhov kub thiab txias hloov thaum lub sij hawm sib txawv txheej txheem. Perfluoroelastomer seals, ntawm qhov tod tes, tsis tsuas yog tiv taus qhov kub thiab txias, tab sis kuj tiv taus qhov nyuaj los yog nkig ntawm qhov kub thiab txias, tswj kev ruaj ntseg sealing kev ua tau zoo thiab ua kom muaj kev ua haujlwm zoo ntawm cov khoom siv hauv ntau yam kev ua haujlwm nyuaj.
4. Tswj kev pheej hmoo ntawm nag lossis daus: Kev tswj nag lossis daus los ntawm cov ntsaws ruaj ruaj yog qhov tseem ceeb hauv kev tsim khoom semiconductor. Cov khoom siv roj hmab tshwj xeeb xws li fluoroelastomer thiab perfluoroelastomer siv cov qauv tsim kho kom zoo thiab cov txheej txheem tsim khoom kom txo qis kev siv ntau yam ntxiv, yog li txo qis qhov tshwm sim ntawm nag lossis daus ntawm impurities xws li cov organic molecules me me thiab hlau ions thaum lub sijhawm tsim khoom. Cov yam ntxwv dej nag tsawg no ua kom ntseeg tau tias cov ntsaws ruaj ruaj tsis dhau los ua qhov muaj peev xwm ntawm kev sib kis, tswj hwm qhov chaw huv huv uas xav tau rau kev tsim khoom semiconductor.
III. Kev ua tau zoo yuav tsum tau ua thiab xaiv cov txheej txheem tshwj xeeb rau roj hmab foob
1. Cov Khoom Uas Muaj Feem Xyuam Ntawm Kev Huv Huv: Nto roughness, volatility, thiab particle tso tawm yog cov cim tseem ceeb ntawm cov ntsaws ruaj ruaj. Cov ntsaws ruaj ruaj uas tsis tshua muaj qhov roughness tsis tshua muaj qhov cuam tshuam rau cov khoom seem, thaum tsis tshua muaj hluav taws xob txo qhov kev pheej hmoo ntawm cov pa roj carbon monoxide emissions los ntawm cov ntsaws ruaj ruaj nyob rau hauv qhov chaw kub kub. Thaum xaiv cov ntsaws ruaj ruaj, muab cov khoom tseem ceeb nrog cov kev kho mob tshwj xeeb uas muaj qhov tsis muaj hluav taws xob tsawg thiab particle emission. Piv txwv li, plasma-kho perfluoroelastomer ntsaws ruaj ruaj muab ib tug smoother nto thiab zoo txo volatility. Tsis tas li ntawd, xyuam xim rau lub foob cov khoom tso tawm thiab xaiv cov khoom lag luam uas tau dhau los ua kev sim tso tawm kom ntseeg tau tias lawv tsis muaj teeb meem emissions nyob rau hauv ib puag ncig tsim khoom semiconductor.
2. Chemical compatibility: Xaiv cov khoom siv roj hmab uas tsim nyog raws li cov tshuaj reagents tshwj xeeb tau ntsib thaum tsim khoom semiconductor. Ntau hom fluoroelastomer thiab perfluoroelastomer muaj qhov sib txawv ntawm cov tshuaj sib txawv. Rau cov txheej txheem uas muaj zog oxidizing acids, oxidizing perfluoroelastomer seals yuav tsum raug xaiv. Rau cov txheej txheem uas muaj cov kuab tshuaj organic, fluoroelastomer seals yuav yog qhov kev xaiv zoo dua.
3. Lub cev muaj zog: Cov no suav nrog hardness, elastic modulus, thiab compression set. Cov ntsaws ruaj ruaj nrog nruab nrab hardness xyuas kom muaj lub foob zoo thaum tseem ua kom yooj yim rau kev teeb tsa thiab tshem tawm. Elastic modulus thiab compression teeb qhia txog kev ua haujlwm ruaj khov ntawm lub foob nyob rau hauv kev ntxhov siab ntev. Nyob rau hauv qhov kub thiab txias ib puag ncig, cov ntsaws ruaj ruaj nrog tsawg compression teeb yuav tsum tau xaiv los xyuas kom meej lub sij hawm ntev, ruaj khov sealing kev ua tau zoo.
IV. Kev Tshawb Fawb Cov Ntawv Thov Kev Tshawb Fawb
Ib lub chaw tsim khoom lag luam uas paub zoo tshaj plaws tau ntsib ntau zaus corrosion thiab kev laus ntawm cov pa roj hmab foob hauv cov khoom siv etching ntawm nws cov chip manufacturing kab. Qhov no ua rau muaj kev nkag mus rau sab hauv, cuam tshuam rau kev tsim khoom thiab txo cov nti tawm los vim muaj cov kab mob sib kis. Tsis tas li ntawd, cov pa ntsaws ruaj ruaj tso tawm ntau cov organic impurities thaum lub sij hawm high-temperature txheej txheem, paug cov khoom semiconductor thiab ua rau cov khoom tsis ruaj khov. Tom qab hloov lawv nrog perfluoroelastomer ntsaws ruaj ruaj uas tsim los ntawm peb lub tuam txhab, cov cuab yeej ua haujlwm ruaj khov txhim kho tau zoo. Tom qab ib xyoos ntawm kev saib xyuas kev ua haujlwm tas mus li, cov ntsaws ruaj ruaj tsis pom muaj kev tiv thaiv corrosion los yog kev laus, tswj kom huv si sab hauv, thiab nce nti tawm los ntawm 80% mus rau ntau dua 95%. Qhov no tau ua tiav ua tsaug rau perfluoroelastomer seals 'cov tshuaj lom neeg zoo heev, cov yam ntxwv los nag tsawg, thiab lub cev zoo heev, ua rau muaj txiaj ntsig zoo rau lub tuam txhab.
Xaus: Hauv kev lag luam semiconductor, uas siv zog rau qhov tseeb thiab huv, tshwj xeeb roj hmab seals ua lub luag haujlwm tseem ceeb. Cov khoom siv roj hmab tshwj xeeb xws li fluoropolymer thiab perfluoroelastomer, nrog rau lawv cov kev ua tau zoo tshaj, nrog rau kev tswj nruj heev los nag, muab kev ruaj ntseg sealing rau cov khoom siv semiconductor, pab kev lag luam tsis tu ncua mus rau qib siab dua.
Post lub sij hawm: Oct-17-2025