Ma ke kahua ʻenehana kiʻekiʻe o ka hana semiconductor, pono kēlā me kēia ʻanuʻu i ka pololei a me ka maʻemaʻe loa. ʻO nā sila laholio kūikawā, ma ke ʻano he mau ʻāpana koʻikoʻi e hōʻoia i ka hana paʻa o nā lako hana a mālama i kahi ʻano hana maʻemaʻe loa, he hopena pololei ia i ka hua a me ka hana o nā huahana semiconductor. I kēia lā, e ʻimi mākou i ke ʻano o nā sila laholio kūikawā e like me ka fluororubber a me ka perfluoroelastomer e pāʻani i kahi kuleana koʻikoʻi i ka hana semiconductor.
I. Nā Koi Paʻa o nā Kaiapuni Hana Semiconductor
Hana pinepine ʻia ka hana ʻana o ka semiconductor i loko o nā lumi maʻemaʻe, kahi e kiʻekiʻe loa ai nā koi hoʻomaʻemaʻe o ke kaiapuni. ʻOiai nā ʻāpana liʻiliʻi o nā mea haumia hiki ke hana i nā kaapuni pōkole chip a i ʻole nā hemahema hana ʻē aʻe. Eia kekahi, pili ke kaʻina hana i ka hoʻohana ʻana i nā ʻano kemika ʻino loa, e like me nā photoresists, nā hopena etching, a me nā wai hoʻomaʻemaʻe. Eia kekahi, ʻike kekahi mau ʻanuʻu hana i nā loli koʻikoʻi o ka mahana a me ke kaomi. No ka laʻana, ʻo nā kaʻina hana etching a me ka ion implantation e hoʻoulu i nā mahana a me nā kaomi kiʻekiʻe i loko o nā lako. Eia kekahi, hiki i nā precipitates mai nā sila ke loaʻa ka hopena koʻikoʻi i ka hana semiconductor. ʻOiai nā nui liʻiliʻi o nā precipitates hiki ke hoʻohaumia i nā mea semiconductor a i ʻole nā kaʻina hana, e hoʻopilikia ana i ka pololei o ke kaʻina hana.
II. Nā Kuleana Koʻikoʻi o nā Sila Lahopa Kūikawā
1. Ke Kāohi ʻana i ka Haumia ʻĀpana: Hoʻopale pono nā sila laholio kūikawā i ka lepo, nā mea haumia, a me nā ʻāpana ʻē aʻe mai ke kaiapuni waho mai ke komo ʻana i nā lako, e mālama ana i kahi kaiapuni maʻemaʻe. Ma ke ʻano he laʻana, ʻo ko lākou ʻili laumania e kūʻē i ka omo ʻana o nā ʻāpana. ʻO ko lākou maʻalahi maikaʻi loa e hiki ai iā lākou ke hoʻopili pono i nā ʻāpana lako, e hana ana i kahi pale sila hilinaʻi a me ka hōʻoia ʻana ua kaʻawale ke kaʻina hana semiconductor mai ka haumia ʻāpana.
2. Ke kū'ē nei i ka palaho kemika: Hāʻawi nā sila e like me ka fluorocarbon a me ka perfluoroelastomer i ke kū'ē maikaʻi loa i nā reagents kemika i hoʻohana pinepine ʻia i ka hana semiconductor. Kū'ē nā sila Fluorocarbon i nā hopena acidic a me alkaline maʻamau a me nā mea hoʻoheheʻe organik, ʻoiai ʻo nā sila perfluoroelastomer e paʻa loa i nā wahi kemika oxidizing a me corrosive. No ka laʻana, i nā kaʻina hana etching pulu, hiki i nā sila perfluoroelastomer ke kū i ka hoʻopili lōʻihi me nā hopena etching acidic kiʻekiʻe me ka ʻole o ka palaho, e hōʻoiaʻiʻo ana i ka sila a me ke kūpaʻa o nā lako.
3. Hoʻololi i nā loli o ka mahana a me ke kaomi: ʻIke nā lako hana Semiconductor i nā loli pinepine o ka mahana a me ke kaomi i ka wā o ka hana. Pono nā sila rubber kūikawā i ke kūpaʻa wela kiʻekiʻe a me ka haʻahaʻa, a me ka elasticity maikaʻi loa a me ke kūpaʻa kaomi. Mālama nā sila Fluororubber i ka elasticity maikaʻi loa a me nā waiwai sila i loko o kahi pae mahana, e hoʻololi ana i nā loli o ka mahana i nā pae hana like ʻole. ʻO nā sila Perfluoroelastomer, ma ka ʻaoʻao ʻē aʻe, ʻaʻole wale e kū i nā mahana kiʻekiʻe akā kūʻē hoʻi i ka lilo ʻana i paʻakikī a palupalu paha i nā mahana haʻahaʻa, e mālama ana i ka hana sila hilinaʻi a me ka hōʻoia ʻana i ka hana maʻamau o nā lako ma lalo o nā kūlana hana paʻakikī like ʻole.
4. Ke kāohi ʻana i ka pilikia o ka ua: He mea koʻikoʻi ka kāohi ʻana i ka ua mai nā sila i ka hana semiconductor. Hoʻohana nā sila laholio kūikawā e like me ka fluoroelastomer a me ka perfluoroelastomer i nā ʻano hana i hoʻomaikaʻi ʻia a me nā kaʻina hana e hōʻemi i ka hoʻohana ʻana i nā mea hoʻohui like ʻole, a laila e hōʻemi ana i ka hiki ke ua o nā haumia e like me nā molekala organik liʻiliʻi a me nā ion metala i ka wā o ke kaʻina hana. Hōʻoia kēia mau ʻano ua haʻahaʻa ʻaʻole e lilo nā sila i kumu kūpono o ka haumia, e mālama ana i kahi kaiapuni maʻemaʻe loa e pono ai no ka hana semiconductor.
III. Nā Koina Hana a me nā Kūlana Koho no nā Sila Lahopa Kūikawā
1. Nā ʻAno Pili i ka Maʻemaʻe: ʻO ka ʻinoʻino o ka ʻili, ka volatility, a me ka hoʻokuʻu ʻana o nā ʻāpana he mau hōʻailona koʻikoʻi o nā sila. ʻO nā sila me ka ʻinoʻino o ka ʻili haʻahaʻa e emi iki ka maʻalahi o ka hōʻiliʻili ʻana o nā ʻāpana, ʻoiai ʻo ka volatility haʻahaʻa e hōʻemi ana i ka pilikia o ka hoʻokuʻu ʻana o nā kinoea organik mai nā sila i nā wahi wela kiʻekiʻe. I ke koho ʻana i nā sila, e hoʻonohonoho i nā huahana me nā hana ʻili kūikawā e hāʻawi ana i ka volatility haʻahaʻa a me ka hoʻokuʻu ʻana o nā ʻāpana. No ka laʻana, hāʻawi nā sila perfluoroelastomer i mālama ʻia e ka plasma i kahi ʻili laumania a hōʻemi pono i ka volatility. Eia kekahi, e hoʻolohe i nā ʻano hoʻokuʻu o ka sila a koho i nā huahana i hala i ka hoʻāʻo hoʻokuʻu koʻikoʻi e hōʻoia i ka ʻole o lākou e hoʻokuʻu i nā hoʻokuʻu ʻino i nā wahi hana semiconductor.
2. Hoʻohālikelike kemika: E koho i ka mea laholio kūpono e pili ana i nā reagents kemika kikoʻī i loaʻa i ka wā o ka hana semiconductor. Loaʻa i nā ʻano fluoroelastomer a me perfluoroelastomer ke kū'ē like ʻole i nā kemika like ʻole. No nā kaʻina hana e pili ana i nā waikawa oxidizing ikaika, pono e koho ʻia nā sila perfluoroelastomer oxidizing kiʻekiʻe. No nā kaʻina hana e pili ana i nā mea hoʻoheheʻe organik maʻamau, ʻoi aku ka maikaʻi o ke koho ʻana i nā sila fluoroelastomer.
3. Nā waiwai kino: ʻO kēia ka paʻakikī, ka modulus elastic, a me ka hoʻonohonoho compression. Hōʻoia nā sila me ka paʻakikī waena i kahi sila maikaʻi me ka hoʻomaʻamaʻa ʻana i ke kau ʻana a me ka wehe ʻana. Hōʻike ka modulus elastic a me ka hoʻonohonoho compression i ke kūpaʻa o ka hana o kahi sila ma lalo o ke kaumaha lōʻihi. I nā wahi wela kiʻekiʻe a me ke kaomi kiʻekiʻe, pono e koho ʻia nā sila me ka hoʻonohonoho compression liʻiliʻi e hōʻoia i ka hana sila lōʻihi a paʻa.
IV. Ka Nānā ʻana i nā Hihia Hoʻohana Kūpono
Ua ʻike pinepine ʻia ka pala a me ka ʻelemakule ʻana o nā sila laholio maʻamau i loko o nā lako hana etching ma kāna laina hana chip. Ua alakaʻi kēia i nā leaka kūloko, e hoʻopilikia ana i ka pono o ka hana ʻana a me ka hōʻemi nui ʻana i nā hua chip ma muli o ka haumia o nā ʻāpana. Eia kekahi, ua hoʻokuʻu nā sila maʻamau i nā nui o nā haumia organik i ka wā o ke kaʻina hana wela kiʻekiʻe, e haumia ana i ka mea semiconductor a e hoʻoulu ai i ka hana huahana paʻa ʻole. Ma hope o ka hoʻololi ʻana iā lākou me nā sila perfluoroelastomer i hana ʻia e kā mākou hui, ua hoʻomaikaʻi nui ʻia ke kūpaʻa o ka hana o nā lako. Ma hope o hoʻokahi makahiki o ka nānā mau ʻana i ka hana, ʻaʻole i hōʻike nā sila i nā hōʻailona o ka pala a i ʻole ka ʻelemakule, e mālama ana i kahi loko maʻemaʻe loa, a e hoʻonui ana i nā hua chip mai 80% a ʻoi aku ma mua o 95%. Ua hoʻokō ʻia kēia mahalo i ke kūpaʻa kemika maikaʻi loa o nā sila perfluoroelastomer, nā ʻano ua haʻahaʻa, a me nā waiwai kino maikaʻi loa, e hopena ana i nā pono waiwai nui no ka hui.
Hopena: I loko o ka ʻoihana hana semiconductor, kahi e hoʻoikaika nei no ka pololei loa a me ka maʻemaʻe, he kuleana koʻikoʻi ko nā sila laholio kūikawā. ʻO nā sila laholio kūikawā e like me ka fluoropolymer a me ka perfluoroelastomer, me kā lākou hana kiʻekiʻe, me ka kaohi paʻa ʻana i ka ua, hāʻawi i ka sila hilinaʻi no nā lako hana semiconductor, e kōkua ana i ka ʻoihana e holomua mau i nā pae ʻenehana kiʻekiʻe.
Ka manawa hoʻouna: ʻOkakopa-17-2025